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Microvibration isolation Technology
Microvibration Measurment Record Analysis System
Active Magnetic Canceller
Vibration Isolation Tecnology
Vibration Suppression Technology
Active Magnetic Field Canceller
Protects Electron Beam application equipment from
environmental magnetic interferences High performance Active Magnetic Field Canceller AMC-330
The fluctuations in environmental magnetic field caused by move of magnetic bodies and AC / DC power lines such as the trains, automobiles and the elevators etc., will affect the unfavorable influences to electron beam application equipment like Electron Microscope. The AMC-330 system detects magnetic fluctuations from any direction through highly sensitive magnetometer and digital controller, and generates reverse magnetic field to cancel the fluctuations by use of the Helmholtz coils.
”Scanning Electron Microscope(SEM)
”Transmission Electron Microscope(TEM)
”Focused Ion Beam (FIB)
”Mass Spectrometer (MASS)
”Electron Beam Lithography (EBL)
”Mask Inspection Equipment
”Wafer Inspection System
” High Performance
High damping performance of maximum 40`60‚„B
” Low Cost
Cost of 1/10 against passive shield solution
”@Easy Installation
Easy installation just for arrangement of coils around the equipment to be protected
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